| E-beam+IAD | IBS | APS | |
| Deposition Rate | ~5Å/sec | 1-3Å/sec | 3-8Å/sec |
| Coating Area Per Run | 300cm² | 2000cm² | |
| Thermal Conductivity | Medium | High | High |
| Temperatere Range | 20-300°C | 20-150°C | 20-200°C |
| During Coating | |||
| Number Of Layers | ~50 | Up TO 200 | Up TO 80 |
| Density/Porosity | Dense | Very Dense | Dense |
| Adhesion/Durability | Good | Excellent | Excellent |
| Humigity Sensitivity | Yes,small | No | No |
| Aging Effects | Yes,small | No | No |
| Damage Threshold | Low | High | Medium |
